| 摘要 |
PURPOSE:To make attaching and detaching of the whole of a cathode section unnecessary and to reduce cathode change work by making attachable and detachable the surface part of the cathode secion confronting a substrate related to electric discharge. CONSTITUTION:A cylindrical cathode section 7 and a counter electrode 8 enclosing the section 7 are placed in a vacuum vessel 6. The section 7 is fixed on a base plate 10 with an insulating material 11 in-between, and a substrate 12 is attached to the inside of the electrode 8. The surface part 71 of the cathode section 7 related to electric discharge is attachably, detachably attached to the chamber frame 72. The attaching and detaching of the whole of the cathode section 7 is made unnecessary, and cathode exchange work is reduced. |
