摘要 |
PURPOSE:To enable to control the cooling speed of a substance to be irradiated by infrared rays independent of heat capacity of a heat treatment device by a method wherein cooling gas is introduced to the substance to be irradiated. CONSTITUTION:Infrared beams 3 radiated from halogen lamps 1 are projected to a sample 5 to be irradiated passing in a furnace tube 4 directly or through reflectors 2. Inactive gas or reducing gas 7 is flowed in the furnace tube 4 during the sample 5 is heat-treated. After the sample is held at the heat treatment temperature for the prescribed hours in such a way, the gas 7 is changed at once over cooling gas, nitrogen gas generated from liquid nitrogen for example. Or cooling gas is mixed to the gas 7. Accordingly, the desired temperature descending speed can be obtained. |