| 摘要 |
PURPOSE:To efficiently perform exchange work of an electrode for ion source by a method, in which heating pipes are arranged on the surface of the electrode for ion source and the end parts of said heating pipes are free-mountably-and- demountably attached to the electrode supporting part while providing the cooling water piping around the electrode supporting part. CONSTITUTION:Six heating pipes 21-1-21-6 are radially arranged on the surface of an electrode 1 for ion source while attaching the end parts 22 of said heating pipes 21 to the electrode supporting part 2 in a mountable and demountable state. The cooling water piping 23 is spirally arranged on the peripheral surface of the supporting part 2. The cooling water piping 23 is drown from outside through the flange part of the electrode supporting part for being drown out again. The heat generated in the electrode 1 for ion source is taken out by the heating pipes 21 while being transmitted to the electrode supporting part 2 through their end parts 22 for being taken out outside by the cooling water. For exchanging the electrode 1, it is sufficient to demount the heating pipe end parts 22 from the electrode supporting part 2. |
