MANUFACTURE OF SMOOTH COATING FILM

摘要

PURPOSE:To obtain easily a smooth coating film having a surface free from cracks by forming a layered structure having a soft film on the surface of a coating film and by polishing the structure until the soft film is removed. CONSTITUTION:SiC or the like is deposited on the surface of a body 1 by sputtering to form a coating film 2, and SiC or the like is deposited on the surface of the film 2 by sputtering to form a soft film 3 having lower hardness than the film 2. The resulting layered structure is polished directly and accurately until a smooth surface 4 is obtd. The surface 4 is further polished until the soft film 3 is removed. A smooth coating film 2 having a smooth surface 5 free from cracks is obtd. The film has superior heat resistance, corrosion resistance and wear resistance.