DETECTOR FOR RADIATION DISTRIBUTION OF SEMICONDUCTOR

摘要

PURPOSE:To detect the two-dimensional distribution of radiation with a high resolution quantitatively and on real time by forming a plurality of radiation detectors on the same semiconductor substrate in parallel together with a signal processing circuit. CONSTITUTION:A substrate 11 has radiation detector sections 13 arranged close to the output side of a microchannel plate and a preamplification circuit 15 which is connected electrically to the detector sections 13 with a thin film electrode 14 to receive signals from the detector section 13. The detector sections 13 shall be parallel with each other. As fine radiation detectors are formed in parallel, as compared with the conventional detectors for electron beam or the like, a higher positional resolution is possible to enable a real-time detection.