发明名称 Solution-dropping nozzle device
摘要 A solution-dropping nozzle device comprising an inner tube of a relatively large diameter which permits a solution to flow down therethrough, and a plurality of outer tubes of a relatively small diameter adapted for supplying a cleaning solvent to the lower end part of the inner tube, the outer tubes having at least the lower end parts thereof tight-fitted on an outer circumferential portion of the inner tube so as to enclose the same continuously. The outer tubes may have the lower ends thereof positioned higher than the lower end of the inner tube. The nozzle device is free from the concentration of a dropping solution at the nozzle end part, and the eduction of a solute thereof.
申请公布号 US4542710(A) 申请公布日期 1985.09.24
申请号 US19830526607 申请日期 1983.08.26
申请人 TOKYO DENSHI KAGAKU CO., LTD. 发明人 NAKAYAMA, MUNEO
分类号 B05B7/04;B05C5/00;B05C9/08;B05C11/08;H01L21/00;(IPC1-7):B05C11/08 主分类号 B05B7/04
代理机构 代理人
主权项
地址