| 摘要 |
PURPOSE:To make it possible to continuously monitor the change at a connection part with the elapse of time, by detecting a connection state on the basis of the integrated value of the output from a ring oscillator constituted of a logical circuit containing the connection part of the electrode and the terminal of LSI. CONSTITUTION:A ring oscillator 16 is constituted of a logical circuit containing the electrode and the terminal of LSI. The output of this oscillator 16 is integrated by an integrator circuit 17 having predetermined time constant and the voltage of the integrated rusult is compared with reference voltage being constant voltage by a reference voltage comparator circuit 18. A judge circuit 19 judges a connection state on the basis of the magnitude of the integrated voltage to said reference voltage and a judge result is monitored. By this constitution, the change in the micro-bonding part of the connection part of the electrode and the terminal of an LSI logical circuit is continuously monitored and the point of time, when connection inferiority is generated, can be accurately grasped.
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