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发明名称
PROCEDIMENTO E DISPOSITIVO PER LA DEPOSIZIONE DI MATERIALE SEMICONDUTTORE
摘要
申请公布号
IT1099206(B)
申请公布日期
1985.09.18
申请号
IT19780028167
申请日期
1978.09.28
申请人
SIEMENS AG
发明人
分类号
C30B25/00;C01B33/02;C23C16/52;C30B25/16;H01L21/205;H01L21/31;(IPC1-7):B01J/
主分类号
C30B25/00
代理机构
代理人
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地址
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