发明名称 CHUCKING DEVICE OF LIFTING MACHINE
摘要 PURPOSE:To keep a seed rod in a horizontal state and to reduce rotation variation, by connecting a shank fixed to a holder of a main shaft unit of lifting machine to a weight fixed to a seed rod for semiconductor material with a steel wire. CONSTITUTION:The shank 5B is inserted into the central part of the holder 5A attached to the main shaft unit 4 of lifting machine, and fixed by the setscrew 6. Meanwhile, the trapered shank 5Ca set at the top of the seed rod 5C equipped with the semiconductor material 7 at the bottom is enageged with the tapered hole 5Dd of the almost flat weight 5D, and fixed through the mounting bolt 10. The top part 5Ea of the steel wire 5E is inserted into the thin hole 5Ba set at the central part of the shank 5B, fixed by the stopping 5G, the other end part 5Eb is inserted through the thin hole 5Eb set at the central part of the weight 5D into the empty chamber 5Dc, fixed by the stopping 5G, so that the weight 5D and the holder 5A is connected.
申请公布号 JPS60176990(A) 申请公布日期 1985.09.11
申请号 JP19840030290 申请日期 1984.02.22
申请人 HITACHI SANKI ENGINEERING KK 发明人 KUBOSAWA MINORU;KINUMEGAWA ISAO
分类号 C30B15/32;H01L21/02;H01L21/208 主分类号 C30B15/32
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