发明名称 HYDROGEN FLUORIDE GAS ANALYZER
摘要 PURPOSE:To analyze the concn. of HF in UF6-gas with good accuracy, by separating probe laser beam into analytical beam and reference beam and allowing only the analytical beam to pass the hot lens region of excited HF while detecting refractive spectral diffractions of both beams. CONSTITUTION:A gaseous mixture of UF6 and HF is flowed to piping 12 from the direction shown by the arrow 16 while HF laser beam is transmitted from a transmitter 70 to excite HF-gas. Further, HeNe laser is transmitted from a probe laser transmitter 11 and separated into analytical beam 30 and reference beam 29 by a slitter 24 to be transmitted to the piping 12. The HF-molecule excited at this time is deexcited in a non-radiant manner to generate a hot lens region 6. In this case, the analytical beam 30 receives the fluctuation of the gaseous mixture and the effect of the hot lens region 6 and reaches a beam receiver 9A while refracted. Because the reference beam 29 is not passed through the hot lens region 6, it receives only the fluctuation of the gaseous mixture to reach a beam receiver 9B. Therefore, by setting off gas fluctuations by detecting the refractive spectral diffractions of the beam receivers 9A, 9B, HF in the UF6-gas can be analyzed with good accuracy.
申请公布号 JPS60174933(A) 申请公布日期 1985.09.09
申请号 JP19840030242 申请日期 1984.02.22
申请人 HITACHI SEISAKUSHO KK 发明人 FUJIMORI HARUO;KOMORI ITARU;HORIKAWA TOYOHIKO;KITAMORI TAKEHIKO
分类号 G01N21/00;G01N21/17;G01N21/41;G01N29/00 主分类号 G01N21/00
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