MANUFACTURE OF SI3N4-SIC CERAMIC SINTERED BODY

摘要

After sintering, ceramic body of Si3N4-SiC is heat-treated at 500 DEG -1500 DEG C. in atmosphere of gas mixture of chlorine and nitrogen whereby SiC is converted into silicon chloride which in turn is nitrided to form Si3N4 in the pores of the ceramic body to provide closed pore structure. Gas mixture may contain oxygen. Heat treatment may be conducted in pressurized atmosphere of gas mixture.