| 摘要 |
<p>PURPOSE:To obtain a thermal head which is hard to be oxidized, is stable in resistance value and permits selection of specific resistance up to a high value by using a heating resistor composed of niobium boride and oxygen. CONSTITUTION:A thin film heating resistor 2 which is composed of niobium boride and oxygen by making sputtering or other of the target of niobium boride in a mixed atmosphere of argon and oxygen to let oxygen be contained at more than 0.005 of the niobium in atom ratio is formed on a substrate 1 composed of an electrical insulator such as ceramics, glass or other. An electric conductor 3 which is formed of good electric conductor such as aluminum, gold or other and supplies electric power to the heating element 2 is provided thereon. The heating element 2 and conductor 3 are combined with the silicon oxide, tantalum oxide or these having been made by, e.g., electron beam vapor deposition, sputtering or other to form a protecting layer 4. Thereby the life of the head may be made much longer.</p> |
