| 摘要 |
PURPOSE:To enable the preparation of various kinds of films from highly crystalline polymerized film to amorphous polymerized film in one vacuum apparatus, by evaporating a condensed polycyclic hydrocarbon crystal containing aromatic ring to a substrate in vacuum, and bombarding the substrate with inert gas ion. CONSTITUTION:A condensed polycyclic hydocarbon crystal containing 2-7 aromatic rings is evaporated in vacuum by using a vacuum evaporation apparatus furnished with a means for radiating inert gas ion. Simultaneous to the vacuum evaporation, the substrate is bomboarded with inert gas ion such as He<+>, Ar<+>, Kr<+>, etc. at a prescribed ion current and ion acceleration potential. The evaporated material is deposited in the form of single crystal, polycrystal, amorphous film, or polymerized film having highly oriented constituent molecules, or amorphous polymerized film by properly varying the ion current and the ion acceleration potential. The obtained film has smooth surface and excellent adhesivity to the substrate. |
