| 摘要 |
PURPOSE:To alleviate the influence of a signal level to a detection signal by providing shielding means between a probe card, a detector and the card, the sample when emitting a pulselike electron beam to a sample to be measured, detecting the secondary electrons generated from the sample to measure the potential distribution of the sample. CONSTITUTION:A semiconductor device is contained in a body which constructs a strobe scan type electron microscope, a pulselike electron beam is emitted through a probe card, and the circuit operation of the device is analyzed. In this structure, the card is composed of a glass epoxy substrate 26b having an electron beam passing hole 26a, a metal 26c is formed as shielding means on one surface, and pattern wirings 26d are formed on the other surface. A connector 26e is led from one end of the wirings 26d, and a probe 26f is connected with the other end. The probe 26f is positioned with a resin member 26g, a metal layer 26h is povided as shielding means thereon, and metal layers 26h, 26c are grounded through the connector 26e. |
