| 摘要 |
<p>PURPOSE:To elevate the concn. of hydrocarbon, to accelerate the deposition of diamond and also to obtain the high-purity diamond by performing the excitation of gaseous hydrogen separately from hydrocarbon and bringing the hydrogen made to an atomic state into contact with a heated base plate quickly as much as possible. CONSTITUTION:A base plate 2 is rotatably provided on a holder 3 in the inside of a stainless steel case and the base plate 2 is elevated in temp. with a heater 5 when its temp. is deficient or it is controlled by controlling the distance between the base plate 2 and a W pipe 6. The pipe 6 is provided by directing the small holes 7 toward the base plate 2 and both the rear surface and the side are covered by a heat shielding plate 8 such as Mo insulated electrically from the pipe 6 and this pipe 6 is connected to a power source 11 via the copper terminals 9. Gaseous H2 is fed through a pipe 12 connected to the other terminal 9 and hydrocarbon is fed into the inside of a case 1 decompressed by an exhaust port 14 through a feed port 13. The hydrogen made to an atomic state is generated from gaseous hydrogen by controlling the power source 11 and heating the pipe 6 at the required temp., injected through the holes 7 and collided against the base plate 2.</p> |
