发明名称 AUTOMATIC APPEARANCE INSPECTING METHOD BY SCREEN MASK PROCESS OF LEAD FRAME
摘要 PURPOSE:To improve the inspecting efficiency without mistaking to inspect a malfunction by taking a photograph of a lead frame, monitoring it, masking the inspection unnecessary portion of a screen on the monitor and simultaneously closing up the portion to be inspected, thereby inspecting the malfunction of the frame. CONSTITUTION:The entire lead frame 1 to be inspected is taken by a camera, this photograph is monitored, the inspection unnecessary portion 2 of a screen is coated with a mask, and the inspection necessary portion 3 is merely closed up. Then, a slit area between the upper and lower limits of the position reference of the portion 2 is examined, if there is a plating boundary, it is regarded as being normal, and if not, th examination of the malfunction is further advanced. When an image sensor is used as a detected at this time, the examination can be facilitated, and an automation can be preferably adopted.
申请公布号 JPS60165750(A) 申请公布日期 1985.08.28
申请号 JP19840021432 申请日期 1984.02.07
申请人 HITACHI DENSEN KK 发明人 NAGAKUBO AKIRA
分类号 G01N21/88;G01N21/956;H01L21/66 主分类号 G01N21/88
代理机构 代理人
主权项
地址