| 摘要 |
PURPOSE:To prevent the intrusion of fine particles in the running pipeline into a clean room by providing a shutter device to isolate the pipeline for cargo work from the other pipeline and also a cleaner for the pipeline for cargo work. CONSTITUTION:A pipeline L for running a truck is extended into a clean room, and a door 2 is provided for the opening 1 for cargo work of the pipeline (l) for cargo work positioned in the clean room among the pipeline L. In such a feeder equipment for clean room, a shutter device G to shut out the pipeline (l) for cargo work in an almost or completely enclosed state for the other pipeline is provided, and a cleaner K for the pipeline (l) for cargo work is also provided. The pipeline for cargo work is isolated from the other pipeline by the device G, fine particles in the pipeline for cargo work are removed out by the cleaner K, the opening 1 for cargo work is opened, and cargo work is performed. The intrusion of fine particles in the pipeline L into the clean room can thus be suppressed.
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