发明名称 Method for removing semiconductor layers from salt substrates
摘要 A method is described for removing a CVD semiconductor layer from an alkali halide salt substrate following the deposition of the semiconductor layer. The semiconductor-substrate combination is supported on a material such as tungsten which is readily wet by the molten alkali halide. The temperature of the semiconductor-substrate combination is raised to a temperature greater than the melting temperature of the substrate but less than the temperature of the semiconductor and the substrate is melted and removed from the semiconductor by capillary action of the wettable support.
申请公布号 US4537651(A) 申请公布日期 1985.08.27
申请号 US19820441325 申请日期 1982.11.12
申请人 UNITED TECHNOLOGIES CORPORATION 发明人 SHUSKUS, ALEXANDER J.;COWHER, MELVYN E.
分类号 C30B33/00;(IPC1-7):C30B25/12 主分类号 C30B33/00
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