发明名称 PROCEDIMENTO PER DEROSITARE STRATI MONOCRISTALLINI CON IL METODO EPITASSIALE A SPOSTAMENTO IN FASE LIQUIDA
摘要 A method of depositing a plurality of epitaxial monocrystalline layers of semiconductive materials onto an individual substrate of a plurality of substrates via the sliding liquid phase epitaxy technique whereby the spacing between respective melt-containing chambers and respective substrate-receiving recesses are substantially equal to one another and, during the deposition stage, the temperature of all melts located on respective substrates is lowered a substantially identical amount so that a corresponding epitaxial layer grows on each such substrate.
申请公布号 IT1096839(B) 申请公布日期 1985.08.26
申请号 IT19780025180 申请日期 1978.06.30
申请人 SIEMENS AG 发明人
分类号 C30B19/00;C30B19/06;H01L21/208;H01L21/368;(IPC1-7):H01L/ 主分类号 C30B19/00
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