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发明名称
FLOATING-TYPE ELECTROSTATIC ACTUATOR
摘要
申请公布号
JPH10174460(A)
申请公布日期
1998.06.26
申请号
JP19960352689
申请日期
1996.12.13
申请人
YASKAWA ELECTRIC CORP
发明人
MATSUZAKI KAZUNARI
分类号
H02N1/00;B81B3/00;(IPC1-7):H02N1/00
主分类号
H02N1/00
代理机构
代理人
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