发明名称 AUTOMATIC ALIGNMENT ADJUSTING DEVICE OF OPTICAL MEASUREMENT SYSTEM
摘要 PURPOSE:To simplify structure by adjusting the optical axis of a photodetection part corresponding to a shift of a light beam from a sample and aligning it to the light beam. CONSTITUTION:A two-dimensional light position detector 4 is arranged in the optical measurement system consisting of a light source part 1, sample holder 2, and photodetection part 3 along the optical path from the holder 2 to the photodetection part 3, and a movement adjusting device 5 is combined with the photodetection part 3. Then, the deviation of the holder 2 from prescribed inclination due to strain caused by heat contacting is detected by a detector 4 and the photodetection part 3 is moved by the adjusting device 5 so that its optical axis is aligned to the light beam. Consequently, it is not necessary to fit an adjusting device to the holder 2.
申请公布号 JPS60162939(A) 申请公布日期 1985.08.24
申请号 JP19840017087 申请日期 1984.02.03
申请人 NIPPON SHINKU GIJUTSU KK 发明人 HAYASHI YASUAKI
分类号 G01N21/41;G01B11/00;G01B11/16;G01B11/27;G01J4/00;G01N21/21 主分类号 G01N21/41
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