| 摘要 |
PURPOSE:To prevent deformation and breakage by installing a rolling-contact supporting mechanism which prevents the tilt over a certain angle of a rotor through the rolling-contact with each free edge part of a shaft and the rotor when a lateral swing of the shaft is generated close to a suction port side in comparison to the rotor in a turbo molecular pump. CONSTITUTION:As for a turbo molucular pump equipped with a static vane wheel 5 and a spacer 6 in the pump chamber 3 in a casing 2, a self-lubricating rolling-contact supporting mechanism 19 for preventing the tilt over a certain angle of a rotor 17 is installed in rolling contact at the free edge part of the rotor 17 only the time when a lateral swing is generated on the driving shaft 11 close to a suction port 7 side in comparison to the rotor 17. When the rotor 17 tilts by the angle corresponding to a slit A, the inner peripheral surface 17a of the rotor 17 contacts with a bearing 23, and the tilt in the more degree is prevented. Therefore, the deformation and breakage of a rotary vane wheel in the case when the driving shaft swings laterally can be prevented.
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