| 摘要 |
PURPOSE:To collect dusts generated within the room to an area having a small influence by dividing a super cleaned room into small zones to change a blow-off air flow speed and changing an airstream passage ratio of the floor. CONSTITUTION:A super cleaned chamber 41 is divided into three zones by a sub chambers. The blow-off speeds of cleaned air passing through a high performance filter 45 are set at 0.3m/sec, 0.2m/sec, and 0.3m/sec byb adjusting the opening degree of an air inlet port 44. In this case, when the opening degree of a floor 46 is set so that it is 100% at the center thereof and it is gradually lowered toward both ends thereof, this can be said as a central collecting type at the central floor. Any of dusts 55, 56 and 57 generated from a workman 54 handing a product 53 is collected on the central floor along the airstream, and does not affect the product 53. |
