发明名称 Apparatus for and method of monitoring the operations of a plating process.
摘要 <p>A plating rate monitor includes a Wheatstone bridge, (24), one branch of which is a monitoring resistor (Rm) formed on a printed circuit board located in the same plating environment (26) as an object being plated. The resistor (Rm) undergoes plating at the same rate as the object. Each time the bridge (24) becomes balanced, another resistor branch (Rv) of the bridge, which is variable, is decremented by a preselected value to upset the balance. As the monitoring resistor (Rm) in the plating environment undergoes plating, a change in its resistance causes the bridge to become balanced once again and the time interval for achieving this balance, for a calculated plating thickness change of the monitoring resistor, determines the plating rate.</p>
申请公布号 EP0151236(A1) 申请公布日期 1985.08.14
申请号 EP19840113317 申请日期 1984.11.06
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ACOSTA, RAUL EDMUNDO;YARMCHUK, EDWARD JOHN
分类号 H05K3/18;C23C18/16;C23C18/31;C23C18/40;G01B7/06;H05K1/02;H05K3/00;H05K3/24;(IPC1-7):G01R17/10 主分类号 H05K3/18
代理机构 代理人
主权项
地址
您可能感兴趣的专利