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发明名称
摘要
申请公布号
JPS6025901(Y2)
申请公布日期
1985.08.03
申请号
JP19800065111U
申请日期
1980.05.13
申请人
发明人
分类号
H01L21/677;H01L21/02;H01L21/67;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
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