| 摘要 |
PURPOSE:To obtain the captioned device very sharply focusing ions without limiting the kinds of ion by irradiating the target with a laser beam for generating ions from the point irradiated by the laser beam. CONSTITUTION:A layer of the element of an objective ion kind is formed on the surface of the target 1 by vacuum evaporation. The laser beam from a laser 2 is focused on one point of the surface of the target 1 by a lens 3. As to the ions drawn out from an ion drawing out and exceleration electrode 4 arranged facing the target 1, only the objective ion kind is made to pass through a mass file 5 for being focused on a sample 7 by ion lenses 6. Since the surface of the target 1 is evaporated at the laser beam irradiation point for wearing away, the target 1 should be rotated and forwarded in the axial direction so that the laser beam irradiation point can sprirally move on the target surface. |
