| 摘要 |
PURPOSE:To attain an UHF band resonator of good characteristics by polishing a resonator forming substrate, which is stuck to a supporting substrate, into a parallel thin plate and opening a window on the supporting substrate without influeneces upon this thin plate-shaped substrate. CONSTITUTION:A supporting substrate 10 and a piezoelectric substrate 11 for forming the resonator are stuck to each other by an adhesive layer 12. The outside face of the substrate 11 is polished until the substrate 11 becomes a parallel plane thin plate having a required thickness as the resonator. A resist film 13 is formed on the surface of the thin plate 11 by application, and a window 17 is opened in a part of a resist film 13 on the surface of the supporting substrare 10. The part exposed to the window 17 of the substrate 10 is removed to form a window 9. the exposed part due to the window of the adhesive layer 12 and resist films 13 are removed by the method having less influences upon the substrate 11. Next, electrodes 5 and 6 are provided. |
