| 摘要 |
<p>PURPOSE:To perform highly accurate defect inspection, by performing the preprocessing of a pattern formed by stored reference data and the scanned data of a body to be inspected by decision by majority, and comparing the reference data and the scanned data. CONSTITUTION:An apparatus is composed of a stage unit 10, a video-signal conversion unit 30 and a control unit 40. In the unit 10, the transmitted light, which is projected on the pattern of a body to be inspected 18 from a light source 11, is made to pass to an image sensor 23 and a video signal output control part 24. Processing by windows of 3X3, 5X5 and 7X7 is performed. Both outputs from the unit 10 and the unit 30 are supplied to the control unit 40. Both output signals are compared by a comparator 45. Various processings are performed by a data processor part 47. Images are formed on monitors 41-44 and the processings are confirmed. Thus the false defects are eliminated and the highly accurate detection of the defects can be performed.</p> |
