ION IMPLANTATION CONTROL SYSTEM.,申请号EP19840901552-传众专利搜索

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发明名称	ION IMPLANTATION CONTROL SYSTEM.
摘要
申请公布号	EP0140928(A4)	申请公布日期	1985.07.30
申请号	EP19840901552	申请日期	1984.03.28
申请人	VEECO/AI. INC.	发明人	GAULT, ROGER, B.;KEUTZER, LARRY, L.
分类号	H01J37/317;(IPC1-7):G01N23/00	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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