| 摘要 |
PURPOSE:To prevent stringing of resist and repulsion of resist drops and to make the thickness of coated film uniform by generating air stream directing toward outside of a rotary head with a vane body rotating around the same shaft as the rotary head synchronously with the rotation of the rotary head. CONSTITUTION:A rotary vane body 30 having the same central shaft as a rotary head and rotating synchronously with the rotary head 3 generating on the rotary head 3 air stream directing toward lower end of the outside of the rotary head is provided to the periphery of the rotary head 3, and an outside surrounding member 21 enclosing the rotary head is also provided. By this constitution, stringing of resist and redeposition of resist to a substrate due to repulsion of the resist drops in the stage of coating resist with high viscosity are prevented, and the thickness of coated film is made uniform.
|
