| 摘要 |
PURPOSE:To realize an energy analytical device, by which secondary electrons emitted from a sample can be efficiently detected and the voltage of an internal wiring having been provided in the IC of the sample can be accurately measured, by a method wherein a voltage made to conform to a field-effect distribution is impressed on magnetic substance sleeves provided on the periphery of the electron beam path. CONSTITUTION:When an electron beam 6 is irradiated on the position of an internal wiring, which has been provided in the IC of a sample 5 and a measurement of the voltage of which is needed, secondary electrons 10 are emitted from the wiring position. At this time, the energy of the secondary electrons 10, which are emitted, has become a magnitude according to the value of voltage having been impressed on the internal wiring irradiated, and by detecting the secondary electron 10, which passed through a lead-out grid 7, a buffer grid 8 and an analytical grid 9, by a scintillator 11, the magnitude of voltage of the internal wiring in the IC of the sample 5 is found out. Here, a voltage is conformed to a field-effect distribution to change by a voltage, which is impressed on the scintillator 11, and when the optimum voltage is impressed on magnetic substance sleeves 1 by a movable voltage power source 4, the secondary electrons 10, which are emitted from the analytical grid 9, can be all detected by the scintillator 11. |
