| 摘要 |
PURPOSE:To block sticking phenomenon of a tape by coating a titanium layer or a titanium nitride layer to a tape contact face for a drum or a post constituting a tape running system in the range of the 1st and 2nd thickness in the base of a prescribed member. CONSTITUTION:A sample fitting base 53 fitted with a sample 52 in a tendem form is revoluted in the direction of an arrow 53b with the mechanism turned with the torque of a motor 54 while being rotated in the direction of arrow 53a. A negative voltage is applied to the fitting base 53 with a reference voltage power supply 55. A evaporation source 56 with Ti put in is evaporated by irradiating a beam from a beam device 57. The space between the evaporating source 56 and an ionizing electrode 58 is brought into plasma state by a power supply 59, the evaporated Ti is accelerated toward the sample fitting base 53, collides with the sample 52 with a high kinetic energy to form the Ti layer. Thus, no sticking of the tape takes place and an excellent running characteristic is ensured.
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