Process for catalytic ultrapurification of inert gases

摘要

Process for catalytic ultrapurification of inert gases by reacting the oxygen contained therein with hydrogen in the presence of Pd catalysts with subsequent adsorption of the residual oxygen on copper-containing adsorbents and by precipitating the water formed, the hydrogen being added, prior to the reaction, to the inert gas to be purified in periodically fluctuating amounts, in such a way that the hydrogen is present, alternately, in substoichiometric or in excess amounts with respect to the oxygen present. Nitrogen and/or argon can be brought to a purity of less than 10 ppm of impurities, especially oxygen.