| 摘要 |
PURPOSE:To perform stable abrasion-machining by only turning the vacuum line of a vacuum adsorbing jig on or off so that a chip to be polished is fitted to this jig and the chip is pressed to a glass plate mounted with lapping powder by a spring force. CONSTITUTION:A chip 16 to be polished is mounted on the bottom surface 10 of a vacuum adsorbing jig 7, a flexible hose 15, i.e., vacuum line. is turned on, the vacuum pressure is applied to the bottom surface 10 of the jig 7, and the chip 16 is fixed to the bottom surface 10 inclined by a slight angle by vacuum adsorption. Next, the vacuum adsorbing jig 7 is inserted in the hollow interior of a cylindrical jig 5, a spring 9 is put on it, a cover 6 is fitted, and the vacuum adsorbing jig 7 is elastically held at the lower end of the cylindrical jig 5 with the spring 9. Then, this cylindrical jig 5 is put at a right angle to a glass plate 17 mounted with lapping powder 18 and is slid along the glass surface. The chip 16 adsorbed and fixed by a spring force is pressed to the glass plate 17, and the chip 16 is ground by the powder 18 from its ridge at high precision and a fault is exposed. |
