| 摘要 |
PURPOSE:To always stabilize electrical, optical, and photoconductive characteristics by forming the first layer contg. amorphous Si, the second layer contg. amorphous Si and Ge, and the third layer contg. amorphous Si and N, and incorporating halogen in at least one of the first and second layers. CONSTITUTION:A photoreceptive layer 102 formed on a substrate 101 is composed of the first layer 103 made of amorphous Si, the second layer 104 made of amorphous Si and Ge, and the third layer 105 made of amorphous Si and N. Halogen, H, and a conductivity governor, such as B, Ga, P, or As, are incorporated in at least one of the layers 103 and 104. |
