摘要 |
PURPOSE:To make it possible to minimize the contamination of the wall of a discharge box or the surface of an x-ray take-out window and obtain a high plasma density by using a liquefied material for an actuating material and by providing a means to supply this liquefied material to the discharge space formed between the electrodes. CONSTITUTION:When a mercury 13 within a pot electrode 14 to be used for evacuation of a discharge box 11 is sufficiently cooled by water or liquid nitrogen 16, the vapor pressure of the mercury 13 can be lowered enough, and therefore the discharge box can be kept sufficiently vacuu. When a switch 21 is turned on, the electric charge accumulated in a condenser 20 starts to flow out, causing electric discharge between the electrodes 12, 13. When the discharge occurs, the mercury 13 is heated and vaporized by the electron beam. In this way, a high density plasma can be formed. The vaporized mercury diffuses and reaches the inner wall of the discharge box; however, if a window 17 is properly warmed by a heater 18, the mercury will scarcely adhere to the window 17. |