发明名称 FORMATION OF PATTERN
摘要 PURPOSE:To easily form a pattern large in equivalent refractive index change amt. and having uniform roughness on the whole face on the surface of a light guide by forming an ion exchange layer obtained by injecting H ions on the surface of a lithium niobate crystal base or lithium tantalate crystal base, and irradiating it with electron beams. CONSTITUTION:The x-plate or z-plate of LiNbO3 or LiTaO3 crystal 1 is heat- treated in heated benzoic acid to cause ion exchange between both; to diffuse Li ions 6 in the crystal 1 into the outside and H ions 7 into the inside of the crystal 1. The ion-exchanged crystal 1 is washed with ethanol by using ultrasonic waves. A gold thin film 9 is vapor-deposited on the ion-exchanged layer 8 in order to prevent rise of electrostatic charge caused by electron beam scanning, and its surface is scanned with electron beams 10, and then, the film 9 is removed with an etching soln. The parts of the surface of the light guide thus obtained, scanned with the electron beam are formed into the grating changed in refractive index.
申请公布号 JPS60133406(A) 申请公布日期 1985.07.16
申请号 JP19830240890 申请日期 1983.12.22
申请人 CANON KK 发明人 MIYAWAKI MAMORU
分类号 G02B5/18;G02B6/13;G02B6/134 主分类号 G02B5/18
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