| 摘要 |
PURPOSE:To improve the resolution by forming the titled element so as to have at least one-dimensional arrangement while using a scanning MOS transistor (Tr) connected in series with an ultrasonic wave receiving MOSTr to whose gate a piezoelectric film is formed as a unit. CONSTITUTION:The ultrasonic wave image pickup element 1 consists of receiving unit cells C1-Cn arranged for n-set in an array and an X scanning circuit 2 applying a gate pulse to them and reading a signal of each receiving unit cell. Source electrodes 8 of an X scanning MOSTr are connected together and used as an output terminal of the signal and grounded via a resistor R and a power supply V1. Moreover, a gate electrode 9 is connected to each gate pulse output terminal of the X scanning circuit 2, a pulse signal is applied sequentially so as to read the signal. The drain of the receiving Tr13 is grounded, each bias electrode 15 is connected mutually and connected to a common bias power supply V2 via a piezoelectric film 14.
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