| 摘要 |
PURPOSE:To monitor an interval between a shape measuring sensor and a workpiece to be measured every measurement to measure the shape of the workpiece automatically by using both the shape measuring sensor for measuring the distance from the work with high accuracy and a non-contacting auxiliary sensor having a wide measurable range. CONSTITUTION:The work 2 to be measured is set up on an X direction moving part of a three-dimensional driving mechanism 1 of the non-contacting shape measuring instrument, the optical sensor 3 using laser rays or the like is arranged correspondingly to the work 2 and the sensor 3 is fitted to a Z direction moving part of the mechanism 1 by an angle changing mechanism 4. The Z direction moving part is set up on a Y direction moving part and the peripheral position of the work 2 is measured by the sensor 3 with high accuracy. In addition, the auxiliary sensor based on an ultrasonic sensor 5 having a wide measurable range is arranged on the upper surface of the sensor 2. Thus, both the sensors 3, 5 are used to monitor the distance between the work 2 and the sensor 3 every measurement by a transmitting sensor and a receiving sensor in the sensor 5 and to measure the shape of the work 2 automatically. |
