PIEZOELECTRIC FILM DIAPHRAGM

摘要

PURPOSE:To obtain a dielectric strength of some 2kV with simple electrode structure by selecting the product of thickness and length to a specific range in a piezoelectric film diaphragm. CONSTITUTION:Aluminum electrode 6A, 6B are vapor-deposited in a way such as comb-tooth form to both front and back sides of the piezoelectric film 5. A non-electrode part having a length (l) is provided between the end of the film 5 and the end of the electrodes 6A, 6B. Then the relation between the film thickness (t) and the length (l) of the non-electrode part is decided so that the length (l) is <30mm. and the product (tXl) between the thickness (t) and the length (l) is >=13.5X10<-3>mm.<2>.