| 摘要 |
PURPOSE:To detect instantaneously the abnormality in a working state and to display the cause for the abnormality by detecting laser light and the emission of the vapor generated from a working part, detecting the respective quantities of light, subjecting the same to signal processing and comparing the result thereof with correct values. CONSTITUTION:The 1st photodetecting part 11 is provided behind a dichroic mirror 3 to detect laser light 2b. The 2nd photodetecting part 12 is provided near a work 5 to detect the emission 5a of the vapor generated from the work 5 when the laser light 2a is irradiated. The light detected by both photodetecting parts 11, 12 are fed to a signal processing part 15 which detects the quantity of the laser light 2a and the quantity of the emission 5a of the vapor and detects a time difference of the time for detecting both. The results of the detection are fed to a control part 16 which compares the results with correct values and displays the results thereof on a CRT display device 17 and a printer 18. The abnormality and the cause thereof are quickly detected during laser working by the above-mentioned method. |
