| 摘要 |
<p>An apparatus for micropositioning arrX-ray lithography mask 1 has but a single stage plate 5 for supporting the mask, three piezoelectric transducers 31, 33, 35 for moving the stage plate 5 in the X-Y plane, and three flexure assemblies 11, 13, 15 located equiangularly around the stage plate for supporting the stage plate and formoving the stage plate in the Z-axis. The flexure assemblies each include a single piezoelectric transducer 69 and various flex strips 71, 73 to allow relative motion of the stage plate to occur smoothly in all six of the possible degrees of freedom.</p> |
