| 摘要 |
PURPOSE:To recover efficiently Ar from Ar-base exhaust gas by burning H, CO and hydrocarbon in the exhaust gas, adding CO to remove oxygen, and adsorbing the remaining components except Ar. CONSTITUTION:Gas exhausted from a silicon furnace is a composition contg. CO, CO2, hydrocarbon, hydrogen, oxygen, moisture, etc. besides Ar as the principal component. The exhausted gaseous composition is introduced into catalytic burners 9, 10 through a heater 8 and piping 12. In the burner 9, hydrogen, CO and hydrocarbon in the composition are selectively burned by the action of a catalyst (the 1st stage). In the burner 10, oxygen remaining in the composition passed through the 1st stage is removed by adding CO and causing a catalytic reaction (the 2nd stage). Exhaust gas produced by the catalytic burning is pressurized with a compressor 15 and introduced into an adsorption tower 21a, 21b or 21c through piping 17 to remove impurities by adsorption. The resulting concd. Ar is stored in a product gas tank 26 through piping 27.
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