| 摘要 |
PURPOSE:To prevent the damage of an output mirror by mounting a controller, which measures the temperature of the output mirror and makes and breaks a power supply for discharging and exciting a laser gas, to the output mirror and interrupting the power supply for discharging and exciting the laser gas when the temperature rise value of the output mirror exceeds a set temperature value. CONSTITUTION:A controller 7, which measures the temperature of an output mirror 3 and makes and breaks a power supply 5 for discharging and exciting a laser gas, is fitted to the output mirror 3, and the power supply 5 for discharging and exciting the laser gas is interrupted when the temperature rise value of the output mirror 3 exceeds a set temperature value. The controller 7 is constituted by a temperature measuring element 8 fitted at the end section of the output mirror 3, a temperature measuring instrument 9 connected to the temperature measuring element 8 and a discriminator 10 to which injection power P1 to the power supply 5 for discharging and exciting the laser gas is inputted. Accordingly, the excess temperature rise of the output mirror is prevented, and the damage of the output mirror can be obviated. |
