PROCEDE D'ATTAQUE PAR PLASMA POUR LA FABRICATION DE DISPOSITIFS A SEMI-CONDUCTEURS,申请号FR19790019155-传众专利搜索

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发明名称	PROCEDE D'ATTAQUE PAR PLASMA POUR LA FABRICATION DE DISPOSITIFS A SEMI-CONDUCTEURS
摘要
申请公布号	FR2445620(B1)	申请公布日期	1985.06.28
申请号	FR19790019155	申请日期	1979.07.25
申请人	WESTERN ELECTRIC CY INC	发明人
分类号	H01L21/302;C23F4/00;H01L21/3065;(IPC1-7):H01L21/306;H01L21/70	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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