发明名称 MANUFACTURE OF METALLIC MASK
摘要 PURPOSE:To obtain a metallic mask superior in acid resistance by irradiating the surface of a specified metallic layer on a glass base with electron beams. CONSTITUTION:A chromium layer 2, and a chromium oxide layer 3 are laminated on a glass base 1 and the surface is irradiated with electron beams 4. As a result, a metallic mask superior in acid resistance can be obtained.
申请公布号 JPS60119559(A) 申请公布日期 1985.06.27
申请号 JP19830227161 申请日期 1983.12.01
申请人 NIPPON DENKI KK 发明人 TANAKA TSUYOSHI
分类号 C23C14/04;C03C17/36;C23C26/00;G03F1/00;G03F1/54;H01L21/027 主分类号 C23C14/04
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