| 摘要 |
PURPOSE:To perform an ultrafine drive and to increase the rotary stroke by disposing a movable member between a drive member and a rotary member, and indirectly driving a rotary member by the drive of the movable member by the drive member. CONSTITUTION:A body 80 in which movable members 32, 33 and stationary members 34, 35 are integrally formed is placed on a base plate 31, and the members 34, 35 are secured on the base plate 31 by blots. The center of the body 80 is constructed in an elastic hinge 36 structure, and the members 32, 33 are ultrafine rotated at the center 37 as a center. Drive members 41-44 mad of piezoelectric elements are press-fitted, bonded of clamped by screws between the members 32, 33 and 34, 35. Voltages from variable voltage sources 62a-63d are applied through switches 61a-64d to the drive members 41-44 to drive the members 32, 33 to rotate the rotary plate 51. |
