| 摘要 |
PURPOSE:To obtain a stable composite resonator against a large temperature change in the performance index by using a Y-cut board such as LiTaO2 single crystal where a rotating angle in the direction of Y axis of crystal is within a prescribed range as a substrate and forming a piezoelectric thin film such as ZnO to one side of the substrate. CONSTITUTION:A rotation Y-cut plate of an LiTaO3 single crystal whose rotating angle around the crystal X axis is 0 and whose rotating angle theta around the +Y axis direction is 95 deg.50'<theta<163 deg.36' or a rotating Y cut plate of a crystal whose rotating angle theta from the +Y axis direction to the +Z direction around the X axis is -43 deg.20'<theta<35 deg.15' is used as the substrate. A piezoelectric thin film 10 made of ZnO or AlN is formed on the substrate 20. After electrodes 4, 3 and lead wires 5, 6 to impress a high frequency electric field are formed on the substrate 20 and the thin film 10, the orientating azimuth C of the thin film 10 is set so as to be in parallel with the X axis of the substrate 20. When an electric field in the Y' direction is impressed in the thin film 10 through the electrodes 3, 4, a slide wave having a displacement in parallel with the X axis is excited. |
