| 摘要 |
PURPOSE:To make it possible to improve working efficiency and to perform scheduled working, by continuing the measurement until the pressure obtained by a pressure measuring means becomes a preset pressure value or until the time obtained by a timing means becomes a preset time value. CONSTITUTION:Gas is inputted into the inlet port 2 of a mass flow controller 1 and the flow rate is controlled. The gas is inputted to the container 4 of a calibrating device 3 after the control. With the inflow of the gas, the pressure in the container 4 is increased. The pressure is measured by a pressure gage 6. The output of a timer 9 is inputted to an operation control circuit 7 together with the output of a volume setting device 14. The flow rate is sequentially computed and displayed on a display device 8. The upper limits of the pressures and the measured times are set in the pressure setting circuit 10 and a time setting circuit 11. The outputs are compared with the outputs of the pressure gage 6 and the timer 9. Respectively in comparator circuits 12. At the time when either of the results reaches a preset value, the measurement is finished. The average flow rate during the period is displayed on the display device 8. |
