| 摘要 |
PURPOSE:To reduce an outer diameter for a torque transmission capacity by reducing pressure difference between two chambers disposed at both sides of a sealer, thereby reducing the thickness of the sealer. CONSTITUTION:A rotational shaft 1 led into a vacuum atmosphere is rotatably supported by bearings 3, 4 engaged with a casing 2 of vacuum side. A rotational shaft 12 led to atmospherical side is rotatably supported by bearings 13, 14 engages with a casing 11. A disc-shaped yoke 15 is clamped with the shaft 12, and a magnet 16 is bonded to the yoke 15. The bearings 13, 14 are stopped to move axially by a ring 17 and a stopper ring 18. An oil seal 19 is mounted in the casing 11 between the yoke 15 and the bearing 13. A rotary vacuum pump P is connected with a chamber B formed of the seal 19, the casing and the sealer 10. |
